3.6.5.4
Layout (see Fig. 7 and Fig. 12)
Air-bridge contact
mask
Air-bridge mask
Conductors
Fig. 12 Air-bridge mask layout
0.1 mil
3.6.5.5
The contact area in the airbridge mask shall be 0.1 mil bigger in length and width than the
airbridge contact mask pattern.
3.6.5.6
Alignment structure (Fig. 13)
The alignment structure of the airbridge mask shall be able to align to the airbridge
contact mask to a tolerance of
±0.2 mil.
Fig. 13 Air-bridge mask alignment structure
Air-bridge mask
6.8x6.8 mil
Nanowave Confidential
Thin-film Guidelines/ Page 20 of 20
Summary :
12 Air-bridge mask layout 0.1 mil 3.6.5.5 The contact area in the airbridge mask shall be 0.1 mil bigger in length and width than the airbridge contact mask pattern.
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